Inventor
LEE NAM HOON
KR14 patents
⚠️ This page may combine multiple inventors who share the name “LEE NAM HOON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
7 patentsUS11222786B2Jan 11, 2022
Method of manufacture including polishing pad monitoring method and polishing apparatus including polishing pad monitoring device
SAMSUNG ELECTRONICS CO LTD3 citations69
US11764064B2Sep 19, 2023
Monitoring device, monitoring method and method of manufacturing semiconductor device using reflectivity of wafer
SAMSUNG ELECTRONICS CO LTD2 citations68
US11158510B2Oct 26, 2021
Monitoring device, monitoring method and method of manufacturing semiconductor device using reflectivity of wafer
SAMSUNG ELECTRONICS CO LTD4 citations68
US7677805B2Mar 16, 2010
Fluid dynamic bearing and hard disk drive employing the same
SAMSUNG ELECTRONICS CO LTD2 citations61
US11735427B2Aug 22, 2023
Polishing apparatus including polishing pad conditioner, non-contact displacement sensor, and data processor
SAMSUNG ELECTRONICS CO LTD0 citations59
US10269594B2Apr 23, 2019
Transparent plate and substrate processing system therewith
SAMSUNG ELECTRONICS CO LTD0 citations47
US10665483B2May 26, 2020
Apparatus for treating a substrate
SAMSUNG ELECTRONICS CO LTD0 citations35