Inventor
PARK ILL HYUN
KR3 patents
⚠️ This page may combine multiple inventors who share the name “PARK ILL HYUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
2 patentsUS11764064B2Sep 19, 2023
Monitoring device, monitoring method and method of manufacturing semiconductor device using reflectivity of wafer
SAMSUNG ELECTRONICS CO LTD2 citations68
US11158510B2Oct 26, 2021
Monitoring device, monitoring method and method of manufacturing semiconductor device using reflectivity of wafer
SAMSUNG ELECTRONICS CO LTD4 citations68