Inventor
OH BYUNG JOO
KR3 patents
Patents
3 patentsUS11764064B2Sep 19, 2023
Monitoring device, monitoring method and method of manufacturing semiconductor device using reflectivity of wafer
SAMSUNG ELECTRONICS CO LTD2 citations68
US11158510B2Oct 26, 2021
Monitoring device, monitoring method and method of manufacturing semiconductor device using reflectivity of wafer
SAMSUNG ELECTRONICS CO LTD4 citations68
US10269594B2Apr 23, 2019
Transparent plate and substrate processing system therewith
SAMSUNG ELECTRONICS CO LTD0 citations47