Inventor
IFUKU RYOTA
JP15 patents
Patents
15 patentsUS11972929B2Apr 30, 2024
Processing apparatus and film forming method
TOKYO ELECTRON LTD2 citations72
US9702039B2Jul 11, 2017
Graphene forming method
TOKYO ELECTRON LTD2 citations71
US12018375B2Jun 25, 2024
Flim forming method of carbon-containing film by microwave plasma
TOKYO ELECTRON LTD0 citations62
US12014907B2Jun 18, 2024
Method and device for forming graphene structure
TOKYO ELECTRON LTD0 citations62
US11302576B2Apr 12, 2022
Method of making a semiconductor device including a graphene barrier layer between conductive layers
TOKYO ELECTRON LTD0 citations62
US12116280B2Oct 15, 2024
Method and apparatus for forming graphene structure
TOKYO ELECTRON LTD0 citations61
US12351905B2Jul 8, 2025
Film forming method and film forming apparatus
TOKYO ELECTRON LTD0 citations60
US12534803B2Jan 27, 2026
Film forming method
TOKYO ELECTRON LTD0 citations59
US12168825B2Dec 17, 2024
Film formation method and film formation device
TOKYO ELECTRON LTD0 citations59
US12163898B2Dec 10, 2024
Method and apparatus for detecting abnormal growth of graphene
TOKYO ELECTRON LTD0 citations53
US12037246B2Jul 16, 2024
Method for detecting abnormal growth of graphene, measurement apparatus, and film formation system
TOKYO ELECTRON LTD0 citations53
US10700006B2Jun 30, 2020
Manufacturing method of nickel wiring
TOKYO ELECTRON LTD0 citations52
US12534800B2Jan 27, 2026
Pre-coating method and processing apparatus
TOKYO ELECTRON LTD0 citations51
US12486570B2Dec 2, 2025
Film forming method and film forming apparatus
TOKYO ELECTRON LTD0 citations51
US11091836B2Aug 17, 2021
Graphene structure forming method and graphene structure forming apparatus
TOKYO ELECTRON LTD0 citations51