Inventor

FUJIO AKIRA

JP2 patents

Patents

2 patents

US12163898B2Dec 10, 2024

Method and apparatus for detecting abnormal growth of graphene

TOKYO ELECTRON LTD0 citations53

US12037246B2Jul 16, 2024

Method for detecting abnormal growth of graphene, measurement apparatus, and film formation system

TOKYO ELECTRON LTD0 citations53