Inventor
LEMLEY COREY
US7 patents
Patents
7 patentsUS11460775B2Oct 4, 2022
Method and system for prevention of metal contamination by using a self-assembled monolayer coating
TOKYO ELECTRON LTD2 citations71
US12406887B2Sep 2, 2025
Selective film formation using a self-assembled monolayer
TOKYO ELECTRON LTD0 citations61
US11043378B2Jun 22, 2021
Systems and methods for inhibiting detectivity, metal particle contamination, and film growth on wafers
TOKYO ELECTRON LTD0 citations60
US10734229B2Aug 4, 2020
Method of advanced contact hole pattering
TOKYO ELECTRON LTD1 citations60
US12427451B2Sep 30, 2025
Vacuum assisted filtration
TOKYO ELECTRON LTD0 citations57
US10525416B2Jan 7, 2020
Method of liquid filter wetting
TOKYO ELECTRON LTD0 citations50
US11456185B2Sep 27, 2022
Planarization of semiconductor devices
TOKYO ELECTRON LTD0 citations48