Inventor

FRANKEN WALTER

6 patents

⚠️ This page may combine multiple inventors who share the name “FRANKEN WALTER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

AIXTRON SE

2 patents

US9847241B2Dec 19, 2017

Transport module for a semiconductor fabrication device or coupling device

AIXTRON SE0 citations36

US10822701B2Nov 3, 2020

CVD or PVD reactor for coating large-area substrates

AIXTRON SE0 citations32

GERSDORFF MARKUS

1 patent

US9045818B2Jun 2, 2015

Shadow mask held magnetically on a substrate support

GERSDORFF MARKUS12 citations75

SARTORIUS GMBH

1 patent

US4253963AMar 3, 1981

Asymmetrical ultrafiltration membrane on the basis of cellulose triacetate

SARTORIUS GMBH9 citations67

AIXTRON AG

1 patent

US7056388B2Jun 6, 2006

Reaction chamber with at least one HF feedthrough

AIXTRON AG4 citations58

FRANKEN WALTER

1 patent

US8308867B2Nov 13, 2012

Device for the temperature control of the surface temperatures of substrates in a CVD reactor

FRANKEN WALTER3 citations54