Inventor

SHAH KARTIK

US61 patents

⚠️ This page may combine multiple inventors who share the name “SHAH KARTIK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SHAH KARTIK

APPLIED MATERIALS INC

Upper dome with injection assembly

Gas distribution plate

Thermal processing susceptor

Thermal processing susceptor

Showerhead design

Method and apparatus for supplying improved gas flow to a processing volume of a processing chamber

Thermally uniform deposition station

Physical vapor deposition processing systems target cooling

Heating modulators to improve epi uniformity tuning

EPI pre-heat ring

Gas distribution plate

Gas distribution plate

Asymmetric injection for better wafer uniformity

Dogbone inlet cone profile for remote plasma oxidation chamber

Asymmetric injection for better wafer uniformity

Dogbone inlet cone profile for remote plasma oxidation chamber

Dogbone inlet cone profile for remote plasma oxidation chamber

Susceptor design to reduce edge thermal peak

Heater assembly with purge gap control and temperature uniformity for batch processing chambers

Enhanced process and hardware architecture to detect and correct realtime product substrates

Diode laser for wafer heating for EPI processes

Showerhead design

Graphite susceptor

Gas mixing apparatus

Thermal processing susceptor

Plasma showerhead with improved uniformity

Thermal processing susceptor

Machine learning based smart process recipe builder to improve azimuthal flow and thickness uniformity

Gas injector with baffle

Gas injector with baffle

Liner for processing chamber

Methods and apparatus for gallium nitride deposition

Upper dome with injection assembly

Gas distribution plate

Gas distribution plate

Gas supply member with baffle

Radiation shield modification for improving substrate temperature uniformity

Gas supply member with baffle

Susceptor design to eliminate deposition valleys in the wafer

Showerhead with inlet mixer

Graphite susceptor

Effective and novel design for lower particle count and better wafer quality by diffusing the flow inside the chamber

Eco-efficiency (sustainability) dashboard for semiconductor manufacturing

Processing system and method of delivering a reactant gas

Eco-efficiency (sustainability) dashboard for semiconductor manufacturing

Chamber injector

Chamber injector

Two zone flow cooling plate design with concentric or spiral channel for efficient gas distribution assembly cooling

APPLIED MAT INC

Method and apparatus for supplying improved gas flow to a processing volume of a processing chamber

TAP PHARMACEUTICALS AG

Aqueous formulations of topiramate