Inventor
TALLAVARJULA SAIRAJU
US12 patents
⚠️ This page may combine multiple inventors who share the name “TALLAVARJULA SAIRAJU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
10 patentsUS6803297B2Oct 12, 2004
Optimal spike anneal ambient
APPLIED MATERIALS INC49 citations92
US9558982B2Jan 31, 2017
Minimal contact edge ring for rapid thermal processing
APPLIED MATERIALS INC12 citations80
US10892147B2Jan 12, 2021
Method and apparatus for calibrating optical path degradation useful for decoupled plasma nitridation chambers
APPLIED MATERIALS INC1 citations71
US9403251B2Aug 2, 2016
Minimal contact edge ring for rapid thermal processing
APPLIED MATERIALS INC3 citations71
US7813895B2Oct 12, 2010
Methods for plasma matching between different chambers and plasma stability monitoring and control
APPLIED MATERIALS INC7 citations71
US11529592B2Dec 20, 2022
Gas injector with baffle
APPLIED MATERIALS INC0 citations62
US11077410B2Aug 3, 2021
Gas injector with baffle
APPLIED MATERIALS INC1 citations62
US11885021B2Jan 30, 2024
Gas supply member with baffle
APPLIED MATERIALS INC0 citations61
US11124878B2Sep 21, 2021
Gas supply member with baffle
APPLIED MATERIALS INC0 citations61
US11615944B2Mar 28, 2023
Remote plasma oxidation chamber
APPLIED MATERIALS INC0 citations51
TALLAVARJULA SAIRAJU
2 patentsUS8101906B2Jan 24, 2012
Method and apparatus for calibrating optical path degradation useful for decoupled plasma nitridation chambers
TALLAVARJULA SAIRAJU14 citations89
US9865438B2Jan 9, 2018
Method and apparatus for calibrating optical path degradation useful for decoupled plasma nitridation chambers
TALLAVARJULA SAIRAJU2 citations69