Inventor
BOTTINI PHILIP A
US7 patents
⚠️ This page may combine multiple inventors who share the name “BOTTINI PHILIP A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
4 patentsUS9831091B2Nov 28, 2017
Plasma treating a process chamber
APPLIED MATERIALS INC4 citations71
US11885021B2Jan 30, 2024
Gas supply member with baffle
APPLIED MATERIALS INC0 citations61
US11124878B2Sep 21, 2021
Gas supply member with baffle
APPLIED MATERIALS INC0 citations61
US10290504B2May 14, 2019
Plasma treating a process chamber
APPLIED MATERIALS INC1 citations61
LIU WEI
3 patentsUS8999106B2Apr 7, 2015
Apparatus and method for controlling edge performance in an inductively coupled plasma chamber
LIU WEI43 citations93
US8137463B2Mar 20, 2012
Dual zone gas injection nozzle
LIU WEI36 citations91
US8062472B2Nov 22, 2011
Method of correcting baseline skew by a novel motorized source coil assembly
LIU WEI3 citations61