Inventor
WHITE GREGORY W
US8 patents
⚠️ This page may combine multiple inventors who share the name “WHITE GREGORY W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
6 patentsUS5556147ASep 17, 1996
Wafer tray and ceramic blade for semiconductor processing apparatus
APPLIED MATERIALS INC112 citations97
US5636964AJun 10, 1997
Wafer tray and ceramic blade for semiconductor processing apparatus
APPLIED MATERIALS INC75 citations95
US5570994ANov 5, 1996
Wafer tray and ceramic blade for semiconductor processing apparatus
APPLIED MATERIALS INC60 citations95
US5697748ADec 16, 1997
Wafer tray and ceramic blade for semiconductor processing apparatus
APPLIED MATERIALS INC30 citations91
US5676205AOct 14, 1997
Quasi-infinite heat source/sink
APPLIED MATERIALS INC48 citations91
US5228208AJul 20, 1993
Method of and apparatus for controlling thermal gradient in a load lock chamber
APPLIED MATERIALS INC33 citations86