Inventor
CAIN JOHN L
US11 patents
⚠️ This page may combine multiple inventors who share the name “CAIN JOHN L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VLSI TECHNOLOGY INC
8 patentsUS5624582AApr 29, 1997
Optimization of dry etching through the control of helium backside pressure
VLSI TECHNOLOGY INC290 citations98
US5242532ASep 7, 1993
Dual mode plasma etching system and method of plasma endpoint detection
VLSI TECHNOLOGY INC55 citations95
US5439524AAug 8, 1995
Plasma processing apparatus
VLSI TECHNOLOGY INC186 citations94
US5434104AJul 18, 1995
Method of using corrosion prohibiters in aluminum alloy films
VLSI TECHNOLOGY INC26 citations91
US5336366AAug 9, 1994
New dry etch technique
VLSI TECHNOLOGY INC26 citations91
US5610105AMar 11, 1997
Densification in an intermetal dielectric film
VLSI TECHNOLOGY INC49 citations89
US5503881AApr 2, 1996
Method of processing a semiconductor wafer
VLSI TECHNOLOGY INC27 citations88
US5342476AAug 30, 1994
Reduction of polycide residues through helium backside pressure control during dry etching
VLSI TECHNOLOGY INC4 citations62