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Inventor
HARVEY STEFANIE E
US
2 patents
Patents
2 patents
US5745332A
Apr 28, 1998
Monopolar electrostatic chuck having an electrode in contact with a workpiece
APPLIED MATERIALS INC
26 citations
89
US5982607A
Nov 9, 1999
Monopolar electrostatic chuck having an electrode in contact with a workpiece
APPLIED MATERIALS INC
3 citations
59