Inventor
ZEININGER HEINZ
DE3 patents
Patents
3 patentsUS5576223ANov 19, 1996
Method of defect determination and defect engineering on product wafer of advanced submicron technologies
SIEMENS AG112 citations93
US5439831AAug 8, 1995
Low junction leakage MOSFETs
SIEMENS AG20 citations90
US5872382AFeb 16, 1999
Low junction leakage mosfets with particular sidewall spacer structure
SIEMENS AG15 citations71