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Inventor
SHEN GUO HUA
JP
3 patents
⚠️ This page may combine multiple inventors who share the name “SHEN GUO HUA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ULVAC INC
1 patent
US6616417B2
Sep 9, 2003
Spatter ion pump
ULVAC INC
8 citations
67
ULVAC CORP
1 patent
US5980212A
Nov 9, 1999
Anode-cathode structure for ion pump having specifically determined dimensions
ULVAC CORP
7 citations
63
IIJIMA EIICHI
1 patent
US8198797B2
Jun 12, 2012
Method of controlling electron beam focusing of pierce-type electron gun and control apparatus therefor
IIJIMA EIICHI
2 citations
57