Inventor
CHENG DONG-HSU
TW17 patents
⚠️ This page may combine multiple inventors who share the name “CHENG DONG-HSU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
10 patentsUS9230867B2Jan 5, 2016
Structure and method for E-beam in-chip overlay mark
TAIWAN SEMICONDUCTOR MFG65 citations96
US6247599B1Jun 19, 2001
Electrostatic discharge-free container equipped with metal shield
TAIWAN SEMICONDUCTOR MFG41 citations90
US5807660ASep 15, 1998
Avoid photoresist lifting by post-oxide-dep plasma treatment
TAIWAN SEMICONDUCTOR MFG51 citations89
US7029800B2Apr 18, 2006
Reticle with antistatic coating
TAIWAN SEMICONDUCTOR MFG13 citations82
US6365303B1Apr 2, 2002
Electrostatic discharge damage prevention method on masks
TAIWAN SEMICONDUCTOR MFG15 citations80
US6948619B2Sep 27, 2005
Reticle pod and reticle with cut areas
TAIWAN SEMICONDUCTOR MFG18 citations78
US5962193AOct 5, 1999
Method and apparatus for controlling air flow in a liquid coater
TAIWAN SEMICONDUCTOR MFG10 citations71
US7514184B2Apr 7, 2009
Reticle with antistatic coating
TAIWAN SEMICONDUCTOR MFG0 citations50
US9081293B2Jul 14, 2015
System and method for lithography exposure with correction of overlay shift induced by mask heating
TAIWAN SEMICONDUCTOR MFG0 citations45
US8959460B1Feb 17, 2015
Layout decomposition method
TAIWAN SEMICONDUCTOR MFG0 citations39