Inventor
LIAW YUNG HAW
TW10 patents
⚠️ This page may combine multiple inventors who share the name “LIAW YUNG HAW”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
9 patentsUS5454871AOct 3, 1995
SOG coated apparatus to solve SOG non-uniformity in the VLSI process
TAIWAN SEMICONDUCTOR MFG65 citations94
US5731243AMar 24, 1998
Method of cleaning residue on a semiconductor wafer bonding pad
TAIWAN SEMICONDUCTOR MFG66 citations93
US5334554AAug 2, 1994
Nitrogen plasma treatment to prevent field device leakage in VLSI processing
TAIWAN SEMICONDUCTOR MFG69 citations92
US6247599B1Jun 19, 2001
Electrostatic discharge-free container equipped with metal shield
TAIWAN SEMICONDUCTOR MFG41 citations90
US5434096AJul 18, 1995
Method to prevent silicide bubble in the VLSI process
TAIWAN SEMICONDUCTOR MFG28 citations89
US6365303B1Apr 2, 2002
Electrostatic discharge damage prevention method on masks
TAIWAN SEMICONDUCTOR MFG15 citations80
US5371046ADec 6, 1994
Method to solve sog non-uniformity in the VLSI process
TAIWAN SEMICONDUCTOR MFG10 citations72
US6143618ANov 7, 2000
Procedure for elimating flourine degradation of WSix /oxide/polysilicon capacitors
TAIWAN SEMICONDUCTOR MFG10 citations67
US6127269AOct 3, 2000
Method for enhancing sheet resistance uniformity of chemical vapor deposited (CVD) tungsten silicide layers
TAIWAN SEMICONDUCTOR MFG8 citations65