Inventor
AZUMA JUNZOU
JP18 patents
Patents
18 patentsUS6587581B1Jul 1, 2003
Visual inspection method and apparatus therefor
HITACHI LTD118 citations98
US5134965AAug 4, 1992
Processing apparatus and method for plasma processing
HITACHI LTD866 citations98
US6303932B1Oct 16, 2001
Method and its apparatus for detecting a secondary electron beam image and a method and its apparatus for processing by using focused charged particle beam
HITACHI LTD84 citations97
US5825035AOct 20, 1998
Processing method and apparatus using focused ion beam generating means
HITACHI LTD140 citations97
US5683547ANov 4, 1997
Processing method and apparatus using focused energy beam
HITACHI LTD156 citations97
US5976328ANov 2, 1999
Pattern forming method using charged particle beam process and charged particle beam processing system
HITACHI LTD58 citations96
US5583344ADec 10, 1996
Process method and apparatus using focused ion beam generating means
HITACHI LTD73 citations96
US5504340AApr 2, 1996
Process method and apparatus using focused ion beam generating means
HITACHI LTD94 citations96
US5358806AOct 25, 1994
Phase shift mask, method of correcting the same and apparatus for carrying out the method
HITACHI LTD70 citations96
US5223109AJun 29, 1993
Ion beam processing method and apparatus
HITACHI LTD52 citations96
US4985109AJan 15, 1991
Apparatus for plasma processing
HITACHI LTD99 citations95
US6507029B1Jan 14, 2003
Sample processing apparatus and method for removing charge on sample through light irradiation
HITACHI LTD20 citations92
US6476387B1Nov 5, 2002
Method and apparatus for observing or processing and analyzing using a charged beam
HITACHI LTD44 citations92
US5952658ASep 14, 1999
Method and system for judging milling end point for use in charged particle beam milling system
HITACHI LTD47 citations92
US5447614ASep 5, 1995
Method of processing a sample using a charged beam and reactive gases and system employing the same
HITACHI LTD31 citations92
US5439763AAug 8, 1995
Optical mask and method of correcting the same
HITACHI LTD24 citations92
US5342448AAug 30, 1994
Apparatus for processing a sample using a charged beam and reactive gases
HITACHI LTD39 citations92
US6344115B1Feb 5, 2002
Pattern forming method using charged particle beam process and charged particle beam processing system
HITACHI LTD8 citations74