Inventor
HAMAMURA YUICHI
JP20 patents
⚠️ This page may combine multiple inventors who share the name “HAMAMURA YUICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
15 patentsUS6771077B2Aug 3, 2004
Method of testing electronic devices indicating short-circuit
HITACHI LTD85 citations98
US6303932B1Oct 16, 2001
Method and its apparatus for detecting a secondary electron beam image and a method and its apparatus for processing by using focused charged particle beam
HITACHI LTD84 citations97
US5976328ANov 2, 1999
Pattern forming method using charged particle beam process and charged particle beam processing system
HITACHI LTD58 citations96
US6476387B1Nov 5, 2002
Method and apparatus for observing or processing and analyzing using a charged beam
HITACHI LTD44 citations92
US5952658ASep 14, 1999
Method and system for judging milling end point for use in charged particle beam milling system
HITACHI LTD47 citations92
US7062081B2Jun 13, 2006
Method and system for analyzing circuit pattern defects
HITACHI LTD31 citations91
US7945410B2May 17, 2011
Semiconductor device yield prediction system and method
HITACHI LTD8 citations83
US6344115B1Feb 5, 2002
Pattern forming method using charged particle beam process and charged particle beam processing system
HITACHI LTD8 citations74
US7301146B2Nov 27, 2007
Probe driving method, and probe apparatus
HITACHI LTD8 citations73
US6895346B2May 17, 2005
Method for test conditions
HITACHI LTD10 citations73
US6780660B2Aug 24, 2004
System for testing electronic devices
HITACHI LTD9 citations73
US6770496B2Aug 3, 2004
Method of testing electronic devices
HITACHI LTD8 citations73
US10614391B2Apr 7, 2020
Method and apparatus for work quality control
HITACHI LTD3 citations63
US7352890B2Apr 1, 2008
Method for analyzing circuit pattern defects and a system thereof
HITACHI LTD3 citations61
US6841405B2Jan 11, 2005
Photomask for test wafers
HITACHI LTD0 citations51