Inventor

MARQUART HERMAN

NL2 patents

Patents

2 patents

US11953837B2Apr 9, 2024

Method, substrate and system for estimating stress in a substrate

ASML NETHERLANDS BV0 citations43

US12243768B2Mar 4, 2025

Substrate holder for use in a lithographic apparatus and a device manufacturing method

ASML NETHERLANDS BV0 citations36