Inventor
HUANG KAO-SU
TW8 patents
⚠️ This page may combine multiple inventors who share the name “HUANG KAO-SU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNITED MICROELECTRONICS CORP
6 patentsUS8377829B2Feb 19, 2013
Method of manufacturing a capacitor deep trench and of etching a deep trench opening
UNITED MICROELECTRONICS CORP21 citations89
US7214626B2May 8, 2007
Etching process for decreasing mask defect
UNITED MICROELECTRONICS CORP16 citations82
US6429921B1Aug 6, 2002
Structure of a multi-layered thin film protective layer
UNITED MICROELECTRONICS CORP11 citations71
US6548318B2Apr 15, 2003
Fabrication method for a multi-layered thin film protective layer
UNITED MICROELECTRONICS CORP2 citations60
US7309641B2Dec 18, 2007
Method for rounding bottom corners of trench and shallow trench isolation process
UNITED MICROELECTRONICS CORP1 citations50
US7226798B2Jun 5, 2007
Fabrication method for a multi-layered thin film protective layer
UNITED MICROELECTRONICS CORP1 citations49