Inventor
FUJINO ATSUKO
JP5 patents
⚠️ This page may combine multiple inventors who share the name “FUJINO ATSUKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI ELECTRIC CORP
3 patentsUS7514782B2Apr 7, 2009
Semiconductor device
MITSUBISHI ELECTRIC CORP13 citations83
US6511792B2Jan 28, 2003
Developing process, process for forming pattern and process for preparing semiconductor device using same
MITSUBISHI ELECTRIC CORP7 citations66
US6984473B2Jan 10, 2006
Method of patterning a mask blank
MITSUBISHI ELECTRIC CORP0 citations39