Inventor
YUN SEOKMIN
US14 patents
⚠️ This page may combine multiple inventors who share the name “YUN SEOKMIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
9 patentsUS7294580B2Nov 13, 2007
Method for plasma stripping using periodic modulation of gas chemistry and hydrocarbon addition
LAM RES CORP29 citations92
US7810513B1Oct 12, 2010
Substrate preparation using megasonic coupling fluid meniscus and methods, apparatus, and systems for implementing the same
LAM RES CORP10 citations84
US7584761B1Sep 8, 2009
Wafer edge surface treatment with liquid meniscus
LAM RES CORP10 citations84
US7329321B2Feb 12, 2008
Enhanced wafer cleaning method
LAM RES CORP13 citations83
US7597765B2Oct 6, 2009
Post etch wafer surface cleaning with liquid meniscus
LAM RES CORP7 citations73
US8021512B2Sep 20, 2011
Method of preventing premature drying
LAM RES CORP4 citations62
US7568488B2Aug 4, 2009
Enhanced wafer cleaning method
LAM RES CORP3 citations62
US7967916B2Jun 28, 2011
Method of preventing pattern collapse during rinsing and drying
LAM RES CORP1 citations51
US12205793B2Jan 21, 2025
Method and apparatus for anisotropic pattern etching and treatment
LAM RES CORP0 citations48