Inventor
DE LARIOS JOHN
US22 patents
⚠️ This page may combine multiple inventors who share the name “DE LARIOS JOHN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
17 patentsUS7198055B2Apr 3, 2007
Meniscus, vacuum, IPA vapor, drying manifold
LAM RES CORP41 citations96
US7069937B2Jul 4, 2006
Vertical proximity processor
LAM RES CORP49 citations96
US7350316B2Apr 1, 2008
Meniscus proximity system for cleaning semiconductor substrate surfaces
LAM RES CORP11 citations92
US7240679B2Jul 10, 2007
System for substrate processing with meniscus, vacuum, IPA vapor, drying manifold
LAM RES CORP12 citations92
US7170190B1Jan 30, 2007
Apparatus for oscillating a head and methods for implementing the same
LAM RES CORP21 citations92
US7143527B2Dec 5, 2006
System and method for modulating flow through multiple ports in a proximity head
LAM RES CORP19 citations92
US6616516B1Sep 9, 2003
Method and apparatus for asymmetric processing of front side and back side of semiconductor substrates
LAM RES CORP42 citations92
US7003899B1Feb 28, 2006
System and method for modulating flow through multiple ports in a proximity head
LAM RES CORP11 citations84
US7997288B2Aug 16, 2011
Single phase proximity head having a controlled meniscus for treating a substrate
LAM RES CORP8 citations83
US7264007B2Sep 4, 2007
Method and apparatus for cleaning a substrate using megasonic power
LAM RES CORP4 citations74
US7703462B2Apr 27, 2010
Reduction of entrance and exit marks left by a substrate-processing meniscus
LAM RES CORP4 citations73
US7597765B2Oct 6, 2009
Post etch wafer surface cleaning with liquid meniscus
LAM RES CORP7 citations73
US7722724B2May 25, 2010
Methods for substrate processing in cluster tool configurations having meniscus application systems
LAM RES CORP2 citations63
US7464719B2Dec 16, 2008
Multi-menisci processing apparatus
LAM RES CORP3 citations63
US7396430B2Jul 8, 2008
Apparatus and method for confined area planarization
LAM RES CORP2 citations63
US7383844B2Jun 10, 2008
Meniscus, vacuum, IPA vapor, drying manifold
LAM RES CORP2 citations63
US7598175B2Oct 6, 2009
Apparatus and method for confined area planarization
LAM RES CORP0 citations52