Inventor
ADOMAITIS RAYMOND A
US2 patents
Patents
2 patentsUS6821910B2Nov 23, 2004
Spatially programmable microelectronics process equipment using segmented gas injection showerhead with exhaust gas recirculation
UNIV MARYLAND667 citations94
US7632542B2Dec 15, 2009
Method for controlling uniformity of thin films fabricated in processing systems
UNIV MARYLAND20 citations79