Inventor
SHIRAKASHI MITSUHIKO
JP25 patents
⚠️ This page may combine multiple inventors who share the name “SHIRAKASHI MITSUHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
17 patentsUS6932884B2Aug 23, 2005
Substrate processing apparatus
EBARA CORP26 citations92
US6743349B2Jun 1, 2004
Electrochemical machining method and apparatus
EBARA CORP26 citations92
US6722964B2Apr 20, 2004
Polishing apparatus and method
EBARA CORP17 citations92
US6543080B1Apr 8, 2003
Apparatus and method for cleaning semiconductor substrate
EBARA CORP35 citations92
US6494220B1Dec 17, 2002
Apparatus for cleaning a substrate such as a semiconductor wafer
EBARA CORP31 citations92
US6308361B1Oct 30, 2001
Cleaning apparatus
EBARA CORP21 citations92
US6248009B1Jun 19, 2001
Apparatus for cleaning substrate
EBARA CORP30 citations92
US6667238B1Dec 23, 2003
Polishing method and apparatus
EBARA CORP15 citations91
US8029333B2Oct 4, 2011
Device for polishing peripheral edge of semiconductor wafer
EBARA CORP11 citations83
US7208076B2Apr 24, 2007
Substrate processing apparatus and method
EBARA CORP10 citations83
US7101465B2Sep 5, 2006
Electrolytic processing device and substrate processing apparatus
EBARA CORP14 citations83
US7255778B2Aug 14, 2007
Electrochemical machining method and apparatus
EBARA CORP6 citations73
US6679950B2Jan 20, 2004
Cleaning method and cleaner
EBARA CORP5 citations63
US7655118B2Feb 2, 2010
Electrolytic processing apparatus and method
EBARA CORP4 citations62
US7638030B2Dec 29, 2009
Electrolytic processing apparatus and electrolytic processing method
EBARA CORP3 citations62
US7427345B2Sep 23, 2008
Method and device for regenerating ion exchanger, and electrolytic processing apparatus
EBARA CORP3 citations62
US7569135B2Aug 4, 2009
Electrolytic processing apparatus and substrate processing apparatus and method
EBARA CORP0 citations52