Inventor
RAY RICHARD S
US21 patents
⚠️ This page may combine multiple inventors who share the name “RAY RICHARD S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ENTEGRIS INC
11 patentsUS10247363B2Apr 2, 2019
Smart package
ENTEGRIS INC7 citations82
US9831063B2Nov 28, 2017
Ion implantation compositions, systems, and methods
ENTEGRIS INC3 citations73
US9754786B2Sep 5, 2017
Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system
ENTEGRIS INC2 citations72
US9171725B2Oct 27, 2015
Enriched silicon precursor compositions and apparatus and processes for utilizing same
ENTEGRIS INC4 citations71
US10845006B2Nov 24, 2020
Smart package
ENTEGRIS INC2 citations70
US11062906B2Jul 13, 2021
Silicon implantation in substrates and provision of silicon precursor compositions therefor
ENTEGRIS INC0 citations62
US9142387B2Sep 22, 2015
Isotopically-enriched boron-containing compounds, and methods of making and using same
ENTEGRIS INC3 citations62
US9012874B2Apr 21, 2015
Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system
ENTEGRIS INC3 citations62
US9685304B2Jun 20, 2017
Isotopically-enriched boron-containing compounds, and methods of making and using same
ENTEGRIS INC0 citations52
US10508773B2Dec 17, 2019
Smart package
ENTEGRIS INC0 citations49
US9812291B2Nov 7, 2017
Alternate materials and mixtures to minimize phosphorus buildup in implant applications
ENTEGRIS INC0 citations41
KAIM ROBERT
5 patentsUS8598022B2Dec 3, 2013
Isotopically-enriched boron-containing compounds, and methods of making and using same
KAIM ROBERT12 citations92
US8062965B2Nov 22, 2011
Isotopically-enriched boron-containing compounds, and methods of making and using same
KAIM ROBERT21 citations92
US8399865B2Mar 19, 2013
Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system
KAIM ROBERT11 citations91
US8237134B2Aug 7, 2012
Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system
KAIM ROBERT23 citations91
US8138071B2Mar 20, 2012
Isotopically-enriched boron-containing compounds, and methods of making and using same
KAIM ROBERT3 citations62
IBM
2 patentsADVANCED TECH MATERIALS
2 patentsUS8785889B2Jul 22, 2014
Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system
ADVANCED TECH MATERIALS5 citations83
US8779383B2Jul 15, 2014
Enriched silicon precursor compositions and apparatus and processes for utilizing same
ADVANCED TECH MATERIALS13 citations82