Inventor

HAYASHI NOZOMU

JP19 patents

⚠️ This page may combine multiple inventors who share the name “HAYASHI NOZOMU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HAYASHI NOZOMU

CANON KK

Position detecting method and apparatus

Focal point position detecting method in semiconductor exposure apparatus

Exposure method, exposure apparatus, and method of manufacturing device

Position measurement technique

Imprint apparatus and article manufacturing method

Imprint method, imprint apparatus, and article manufacturing method

Position detector, position detection method, exposure apparatus, and device manufacturing method

Position detecting method and apparatus

Imprint apparatus, imprint method, and method of manufacturing article

Imprint apparatus, method of imprinting, and method of manufacturing article

Imprint method, imprint apparatus, and article manufacturing method using the same

Mark position measuring method and apparatus

Mark position measuring method and apparatus

Detection device, imprint apparatus, planarization device, detection method, and article manufacturing method

Exposure apparatus and device manufacturing method

Position measurement apparatus, imaging apparatus, exposure apparatus, and Device manufacturing method

HAYASHI NOZOMU

Exposure method, exposure apparatus, and method of manufacturing device

Imprint apparatus, and method of manufacturing article

Apparatus and method of processing substrate containing mark and method of manufacturing device