Inventor

TILMANS HENDRIKUS A C

BE5 patents

⚠️ This page may combine multiple inventors who share the name “TILMANS HENDRIKUS A C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NAITO YASUYUKI

2 patents

US8847087B2Sep 30, 2014

MEMS switch and communication device using the same

NAITO YASUYUKI1 citations47

US8723061B2May 13, 2014

MEMS switch and communication device using the same

NAITO YASUYUKI0 citations36

INTERUNIVERSITAIR MICRO ELKTRO

1 patent

US6297072B1Oct 2, 2001

Method of fabrication of a microstructure having an internal cavity

INTERUNIVERSITAIR MICRO ELKTRO422 citations93

JOHNSON SERVICE CO

1 patent

US5165289ANov 24, 1992

Resonant mechanical sensor

JOHNSON SERVICE CO111 citations93

IMEC INTER UNI MICRO ELECTR

1 patent

US7372346B2May 13, 2008

Acoustic resonator

IMEC INTER UNI MICRO ELECTR30 citations90