Inventor
KUDELA JOZEF
US27 patents
⚠️ This page may combine multiple inventors who share the name “KUDELA JOZEF”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
14 patentsUS9761365B2Sep 12, 2017
RF choke for gas delivery to an RF driven electrode in a plasma processing apparatus
APPLIED MATERIALS INC3 citations84
US8343592B2Jan 1, 2013
Asymmetrical RF drive for electrode of plasma chamber
APPLIED MATERIALS INC13 citations84
US10304607B2May 28, 2019
RF choke for gas delivery to an RF driven electrode in a plasma processing apparatus
APPLIED MATERIALS INC2 citations73
US10184179B2Jan 22, 2019
Atomic layer deposition processing chamber permitting low-pressure tool replacement
APPLIED MATERIALS INC3 citations73
US9818580B2Nov 14, 2017
Transmission line RF applicator for plasma chamber
APPLIED MATERIALS INC2 citations71
US11823871B2Nov 21, 2023
Microwave plasma source for spatial plasma enhanced atomic layer deposition (PE-ALD) processing tool
APPLIED MATERIALS INC2 citations70
US10903048B2Jan 26, 2021
Substrate processing method and apparatus for controlling phase angles of harmonic signals
APPLIED MATERIALS INC2 citations69
US12224156B2Feb 11, 2025
Microwave plasma source for spatial plasma enhanced atomic layer deposition (PE-ALD) processing tool
APPLIED MATERIALS INC0 citations62
US11532418B2Dec 20, 2022
RF choke for gas delivery to an RF driven electrode in a plasma processing apparatus
APPLIED MATERIALS INC0 citations62
US10886053B2Jan 5, 2021
RF choke for gas delivery to an RF driven electrode in a plasma processing apparatus
APPLIED MATERIALS INC0 citations62
US9425026B2Aug 23, 2016
Systems and methods for improved radio frequency matching networks
APPLIED MATERIALS INC1 citations52
US9827578B2Nov 28, 2017
Tightly fitted ceramic insulator on large area electrode
APPLIED MATERIALS INC0 citations51
US10043638B2Aug 7, 2018
Compact configurable modular radio frequency matching network assembly for plasma processing systems
APPLIED MATERIALS INC0 citations46
US12312689B2May 27, 2025
Large-area high-density plasma processing chamber for flat panel displays
APPLIED MATERIALS INC0 citations45
KUDELA JOZEF
6 patentsUS9397380B2Jul 19, 2016
Guided wave applicator with non-gaseous dielectric for plasma chamber
KUDELA JOZEF191 citations98
US8728586B2May 20, 2014
RF choke for gas delivery to an RF driven electrode in a plasma processing apparatus
KUDELA JOZEF5 citations83
US8438990B2May 14, 2013
Multi-electrode PECVD source
KUDELA JOZEF10 citations83
US9068262B2Jun 30, 2015
Tightly fitted ceramic insulator on large area electrode
KUDELA JOZEF6 citations82
US9048518B2Jun 2, 2015
Transmission line RF applicator for plasma chamber
KUDELA JOZEF5 citations70
US8872428B2Oct 28, 2014
Plasma source with vertical gradient
KUDELA JOZEF2 citations62
SORENSEN CARL A
3 patentsUS8992723B2Mar 31, 2015
RF bus and RF return bus for plasma chamber electrode
SORENSEN CARL A157 citations97
US8691047B2Apr 8, 2014
Large area plasma processing chamber with at-electrode RF matching
SORENSEN CARL A2 citations61
US8075734B2Dec 13, 2011
Remote inductively coupled plasma source for CVD chamber cleaning
SORENSEN CARL A0 citations51