Inventor
FEI LU
US15 patents
⚠️ This page may combine multiple inventors who share the name “FEI LU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LIBBERT JEFFREY L
4 patentsUS8846493B2Sep 30, 2014
Methods for producing silicon on insulator structures having high resistivity regions in the handle wafer
LIBBERT JEFFREY L68 citations96
US8143078B2Mar 27, 2012
Methods for monitoring the amount of contamination imparted into semiconductor wafers during wafer processing
LIBBERT JEFFREY L4 citations61
US9343379B2May 17, 2016
Method to delineate crystal related defects
LIBBERT JEFFREY L1 citations51
US8822242B2Sep 2, 2014
Methods for monitoring the amount of metal contamination in a process
LIBBERT JEFFREY L0 citations51
MEMC ELECTRONIC MATERIALS
3 patentsUS6284039B1Sep 4, 2001
Epitaxial silicon wafers substantially free of grown-in defects
MEMC ELECTRONIC MATERIALS27 citations92
US7097718B2Aug 29, 2006
Single crystal silicon wafer having an epitaxial layer substantially free from grown-in defects
MEMC ELECTRONIC MATERIALS5 citations73
US6565649B2May 20, 2003
Epitaxial wafer substantially free of grown-in defects
MEMC ELECTRONIC MATERIALS9 citations73
SHANGHAI SIMGUI TECH CO LTD
3 patentsUS10529590B2Jan 7, 2020
Annealing method for improving bonding strength
SHANGHAI SIMGUI TECH CO LTD0 citations48
US10388529B2Aug 20, 2019
Method for preparing substrate with insulated buried layer
SHANGHAI SIMGUI TECH CO LTD0 citations38
US10361114B2Jul 23, 2019
Method for preparing substrate with carrier trapping center
SHANGHAI SIMGUI TECH CO LTD0 citations38