Inventor
LEE WILLIAM D
US22 patents
⚠️ This page may combine multiple inventors who share the name “LEE WILLIAM D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LEE WILLIAM D
9 patentsUS8270142B2Sep 18, 2012
De-clamping wafers from an electrostatic chuck
LEE WILLIAM D6 citations70
US9711324B2Jul 18, 2017
Inert atmospheric pressure pre-chill and post-heat
LEE WILLIAM D5 citations68
US9236216B2Jan 12, 2016
In-vacuum high speed pre-chill and post-heat stations
LEE WILLIAM D3 citations68
US8524584B2Sep 3, 2013
Carbon implantation process and carbon ion precursor composition
LEE WILLIAM D2 citations61
US9048276B2Jun 2, 2015
Matched coefficient of thermal expansion for an electrostatic chuck
LEE WILLIAM D1 citations51
US8330129B1Dec 11, 2012
Uniformity of a scanned ion beam
LEE WILLIAM D1 citations51
US9558980B2Jan 31, 2017
Vapor compression refrigeration chuck for ion implanters
LEE WILLIAM D0 citations39
US8241425B2Aug 14, 2012
Non-condensing thermos chuck
LEE WILLIAM D0 citations39
US8692215B2Apr 8, 2014
Heated rotary seal and bearing for chilled ion implantation system
LEE WILLIAM D0 citations37