Inventor
PETTERSON MAUREEN K
US6 patents
Patents
6 patentsUS9659784B1May 23, 2017
Ion-assisted deposition and implantation of photoresist to improve line edge roughness
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC5 citations82
US10310379B2Jun 4, 2019
Multiple patterning approach using ion implantation
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC5 citations71
US9520290B1Dec 13, 2016
Ion implantation for improved etch performance
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC2 citations59
US9885957B2Feb 6, 2018
Ion-assisted deposition and implantation of photoresist to improve line edge roughness
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations50
US9512517B2Dec 6, 2016
Multiple exposure treatment for processing a patterning feature
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations50
US9735013B2Aug 15, 2017
Ion implantation for improved contact hole critical dimension uniformity
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations45