Inventor
MA TRISTAN
US13 patents
⚠️ This page may combine multiple inventors who share the name “MA TRISTAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC
8 patentsUS9659784B1May 23, 2017
Ion-assisted deposition and implantation of photoresist to improve line edge roughness
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC5 citations82
US10204909B2Feb 12, 2019
Non-uniform gate oxide thickness for DRAM device
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC1 citations62
US10269663B2Apr 23, 2019
Critical dimensions variance compensation
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC1 citations61
US9929015B2Mar 27, 2018
High efficiency apparatus and method for depositing a layer on a three dimensional structure
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC1 citations58
US10002764B1Jun 19, 2018
Sputter etch material selectivity
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC1 citations51
US9460961B2Oct 4, 2016
Techniques and apparatus for anisotropic metal etching
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC1 citations51
US9885957B2Feb 6, 2018
Ion-assisted deposition and implantation of photoresist to improve line edge roughness
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations50
US9435038B2Sep 6, 2016
Ion implant assisted metal etching
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations48
VARIAN SEMICONDUCTOR EQUIPMENT
3 patentsUS9336998B2May 10, 2016
Apparatus and method for dynamic control of ion beam energy and angle
VARIAN SEMICONDUCTOR EQUIPMENT3 citations71
US9396965B2Jul 19, 2016
Techniques and apparatus for anisotropic metal etching
VARIAN SEMICONDUCTOR EQUIPMENT0 citations51
US9268228B2Feb 23, 2016
Techniques for patterning a substrate
VARIAN SEMICONDUCTOR EQUIPMENT1 citations51