Inventor
LEWIS ISABELLA T
US11 patents
⚠️ This page may combine multiple inventors who share the name “LEWIS ISABELLA T”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
4 patentsUS6642726B2Nov 4, 2003
Apparatus and methods for reliable and efficient detection of voltage contrast defects
KLA TENCOR CORP23 citations92
US9939386B2Apr 10, 2018
Systems and methods for sample inspection and review
KLA TENCOR CORP11 citations81
US9645097B2May 9, 2017
In-line wafer edge inspection, wafer pre-alignment, and wafer cleaning
KLA TENCOR CORP10 citations80
US9157868B2Oct 13, 2015
System and method for reviewing a curved sample edge
KLA TENCOR CORP1 citations51