Inventor
KAKEHATA TETSUYA
JP60 patents
⚠️ This page may combine multiple inventors who share the name “KAKEHATA TETSUYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEMICONDUCTOR ENERGY LAB
37 patentsUS7955995B2Jun 7, 2011
Nonvolatile semiconductor memory device and manufacturing method thereof, semiconductor device and manufacturing method thereof, and manufacturing method of insulating film
SEMICONDUCTOR ENERGY LAB92 citations98
US7851279B2Dec 14, 2010
Manufacturing method of semiconductor device
SEMICONDUCTOR ENERGY LAB33 citations93
US7763502B2Jul 27, 2010
Semiconductor substrate, method for manufacturing semiconductor substrate, semiconductor device, and electronic device
SEMICONDUCTOR ENERGY LAB18 citations93
US7696058B2Apr 13, 2010
Method for manufacturing SOI substrate
SEMICONDUCTOR ENERGY LAB15 citations93
US7608490B2Oct 27, 2009
Semiconductor device and manufacturing method thereof
SEMICONDUCTOR ENERGY LAB30 citations93
US8034694B2Oct 11, 2011
SOI substrate, method for manufacturing the same, and semiconductor device
SEMICONDUCTOR ENERGY LAB21 citations92
US7678668B2Mar 16, 2010
Manufacturing method of SOI substrate and manufacturing method of semiconductor device
SEMICONDUCTOR ENERGY LAB23 citations92
US7416928B2Aug 26, 2008
Manufacturing method of semiconductor device
SEMICONDUCTOR ENERGY LAB26 citations91
US8030169B2Oct 4, 2011
SOI substrate and manufacturing method thereof
SEMICONDUCTOR ENERGY LAB8 citations84
US7875532B2Jan 25, 2011
Substrate for manufacturing semiconductor device and manufacturing method thereof
SEMICONDUCTOR ENERGY LAB7 citations84
US7851332B2Dec 14, 2010
Semiconductor device and method for manufacturing the same
SEMICONDUCTOR ENERGY LAB19 citations84
US7781306B2Aug 24, 2010
Semiconductor substrate and method for manufacturing the same
SEMICONDUCTOR ENERGY LAB10 citations84
US7723205B2May 25, 2010
Semiconductor device, manufacturing method thereof, liquid crystal display device, RFID tag, light emitting device, and electronic device
SEMICONDUCTOR ENERGY LAB9 citations84
US12218247B2Feb 4, 2025
Semiconductor device and manufacturing method of the semiconductor device
SEMICONDUCTOR ENERGY LAB2 citations75
US12094979B2Sep 17, 2024
Method for manufacturing semiconductor device
SEMICONDUCTOR ENERGY LAB2 citations73
US11942370B2Mar 26, 2024
Manufacturing method of semiconductor device
SEMICONDUCTOR ENERGY LAB1 citations73
US11705524B2Jul 18, 2023
Semiconductor device and method for manufacturing semiconductor device
SEMICONDUCTOR ENERGY LAB2 citations73
US11508850B2Nov 22, 2022
Manufacturing method of semiconductor device
SEMICONDUCTOR ENERGY LAB1 citations73
US11600489B2Mar 7, 2023
Semiconductor device and method for manufacturing the semiconductor device
SEMICONDUCTOR ENERGY LAB2 citations72
US7274038B2Sep 25, 2007
Silicon nitride film, a semiconductor device, a display device and a method for manufacturing a silicon nitride film
SEMICONDUCTOR ENERGY LAB8 citations72
US12136663B2Nov 5, 2024
Semiconductor device and manufacturing method of semiconductor device
SEMICONDUCTOR ENERGY LAB2 citations71
US12328908B2Jun 10, 2025
Semiconductor device and method for manufacturing semiconductor device
SEMICONDUCTOR ENERGY LAB0 citations63
US9184173B2Nov 10, 2015
Semiconductor device and manufacturing method thereof
SEMICONDUCTOR ENERGY LAB3 citations63
US8022469B2Sep 20, 2011
Semiconductor device and manufacturing method thereof
SEMICONDUCTOR ENERGY LAB3 citations63
US7994022B2Aug 9, 2011
Semiconductor substrate and semiconductor device and manufacturing method of the same
SEMICONDUCTOR ENERGY LAB3 citations63
US7842584B2Nov 30, 2010
Method for manufacturing semiconductor device
SEMICONDUCTOR ENERGY LAB2 citations63
US7790563B2Sep 7, 2010
Semiconductor device, electronic device and method for manufacturing semiconductor device
SEMICONDUCTOR ENERGY LAB6 citations63
US12382669B2Aug 5, 2025
Manufacturing method of semiconductor device including mulitple oxides
SEMICONDUCTOR ENERGY LAB0 citations62
US12540397B2Feb 3, 2026
Method for forming metal oxide
SEMICONDUCTOR ENERGY LAB0 citations52
US12414284B2Sep 9, 2025
Semiconductor device and method for manufacturing semiconductor device
SEMICONDUCTOR ENERGY LAB0 citations52
US12349481B2Jul 1, 2025
Imaging device, manufacturing method thereof, and electronic device
SEMICONDUCTOR ENERGY LAB0 citations52
US12283632B2Apr 22, 2025
Semiconductor device and method for manufacturing semiconductor device
SEMICONDUCTOR ENERGY LAB0 citations52
US12082390B2Sep 3, 2024
Method for manufacturing semiconductor device
SEMICONDUCTOR ENERGY LAB0 citations52
US12057508B2Aug 6, 2024
Semiconductor device and method for manufacturing semiconductor device
SEMICONDUCTOR ENERGY LAB0 citations52
US11362034B2Jun 14, 2022
Semiconductor device having a laminate contact plug of specified configuration including a conductive metal oxide layer
SEMICONDUCTOR ENERGY LAB0 citations52
US10985278B2Apr 20, 2021
Method for manufacturing semiconductor device
SEMICONDUCTOR ENERGY LAB0 citations52
US10026966B2Jul 17, 2018
Negative electrode for lithium secondary battery, lithium secondary battery, and manufacturing methods thereof
SEMICONDUCTOR ENERGY LAB1 citations52
KAKEHATA TETSUYA
6 patentsUS9231070B2Jan 5, 2016
Nonvolatile semiconductor memory device and manufacturing method thereof, semiconductor device and manufacturing method thereof, and manufacturing method of insulating film
KAKEHATA TETSUYA6 citations84
US8207045B2Jun 26, 2012
Method for manufacturing SOI substrate
KAKEHATA TETSUYA5 citations73
US8912624B2Dec 16, 2014
Semiconductor substrate and method for manufacturing the same
KAKEHATA TETSUYA3 citations62
US8633542B2Jan 21, 2014
SOI substrate and manufacturing method thereof
KAKEHATA TETSUYA1 citations62
US8390067B2Mar 5, 2013
Substrate for manufacturing semiconductor device and manufacturing method thereof
KAKEHATA TETSUYA2 citations62
US8114722B2Feb 14, 2012
Manufacturing method of semiconductor device
KAKEHATA TETSUYA4 citations62
OHNUMA HIDETO
2 patentsMAEKAWA SHINJI
2 patentsUS8535965B2Sep 17, 2013
Silicon nitride film, a semiconductor device, a display device and a method for manufacturing a silicon nitride film
MAEKAWA SHINJI2 citations61
US8227805B2Jul 24, 2012
Silicon nitride film, a semiconductor device, a display device and a method for manufacturing a silicon nitride film
MAEKAWA SHINJI3 citations61
YAMAZAKI SHUNPEI
1 patentTAKANO TAMAE
1 patentKATO SHO
1 patentShowing the top 50 of 60 patents by PatentIndex Score.