Inventor
POLET THEODORUS WILHELMUS
NL26 patents
⚠️ This page may combine multiple inventors who share the name “POLET THEODORUS WILHELMUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
25 patentsUS9785055B2Oct 10, 2017
Object holder and lithographic apparatus
ASML NETHERLANDS BV7 citations83
US10416571B2Sep 17, 2019
Fluid handling structure and lithographic apparatus
ASML NETHERLANDS BV4 citations82
US10222707B2Mar 5, 2019
Lithographic apparatus and a device manufacturing method
ASML NETHERLANDS BV3 citations72
US9915877B2Mar 13, 2018
Object holder and lithographic apparatus
ASML NETHERLANDS BV3 citations72
US11231653B2Jan 25, 2022
Fluid handling structure and lithographic apparatus
ASML NETHERLANDS BV2 citations71
US10969695B2Apr 6, 2021
Fluid handling structure and lithographic apparatus
ASML NETHERLANDS BV2 citations71
US12072636B2Aug 27, 2024
Fluid handling system and lithographic apparatus
ASML NETHERLANDS BV1 citations61
US11614689B2Mar 28, 2023
Fluid handling structure and lithographic apparatus
ASML NETHERLANDS BV0 citations61
US12242200B2Mar 4, 2025
Lithography apparatus and a method of manufacturing a device
ASML NETHERLANDS BV0 citations59
US11860546B2Jan 2, 2024
Fluid handling structure for lithographic apparatus
ASML NETHERLANDS BV0 citations59
US11774857B2Oct 3, 2023
Lithography apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations59
US11720032B2Aug 8, 2023
Process tool and an inspection method
ASML NETHERLANDS BV0 citations59
US11454892B2Sep 27, 2022
Fluid handling structure for lithographic apparatus
ASML NETHERLANDS BV0 citations59
US11372336B2Jun 28, 2022
Lithography apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations59
US11029607B2Jun 8, 2021
Fluid handling structure for lithographic apparatus
ASML NETHERLANDS BV0 citations59
US11809086B2Nov 7, 2023
Fluid handling structure, a lithographic apparatus, a method of using a fluid handling structure and a method of using a lithographic apparatus
ASML NETHERLANDS BV0 citations58
US11156921B2Oct 26, 2021
Fluid handling structure, lithographic apparatus, and method of using a fluid handling structure
ASML NETHERLANDS BV0 citations58
US11086239B2Aug 10, 2021
Cleaning device and method of cleaning
ASML NETHERLANDS BV0 citations55
US10481502B2Nov 19, 2019
Object holder and lithographic apparatus
ASML NETHERLANDS BV0 citations51
US10001712B2Jun 19, 2018
Immersion lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations51
US12566382B2Mar 3, 2026
Fluid handling system, method and lithographic apparatus
ASML NETHERLANDS BV0 citations50
US10317804B2Jun 11, 2019
Substrate table, lithographic apparatus and method of operating a lithographic apparatus
ASML NETHERLANDS BV0 citations48
US10571810B2Feb 25, 2020
Substrate table, a lithographic apparatus and a method of operating a lithographic apparatus
ASML NETHERLANDS BV0 citations47
US11143969B2Oct 12, 2021
Method of performance testing working parameters of a fluid handling structure and a method of detecting loss of immersion liquid from a fluid handing structure in an immersion lithographic apparatus
ASML NETHERLANDS BV0 citations44
US10324384B2Jun 18, 2019
Lithographic apparatus and a method of manufacturing a lithographic apparatus
ASML NETHERLANDS BV0 citations40