Inventor

CORCORAN GREGORY MARTIN MASON

NL12 patents

⚠️ This page may combine multiple inventors who share the name “CORCORAN GREGORY MARTIN MASON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

6 patents

US9823589B2Nov 21, 2017

Lithographic apparatus and method

ASML NETHERLANDS BV5 citations83

US10222707B2Mar 5, 2019

Lithographic apparatus and a device manufacturing method

ASML NETHERLANDS BV3 citations72

US10520837B2Dec 31, 2019

Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV1 citations71

US11300890B2Apr 12, 2022

Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV0 citations61

US10203611B2Feb 12, 2019

Lithographic apparatus and method

ASML NETHERLANDS BV0 citations51

US10591828B2Mar 17, 2020

Lithographic apparatus and method

ASML NETHERLANDS BV0 citations49

LAURENT THIBAULT SIMON MATHIEU

1 patent

US9298107B2Mar 29, 2016

Lithographic apparatus and method

LAURENT THIBAULT SIMON MATHIEU6 citations80

EUMMELEN ERIK HENRICUS EGIDIUS CATHARINA

1 patent

US8416388B2Apr 9, 2013

Fluid handling device, an immersion lithographic apparatus and a device manufacturing method

EUMMELEN ERIK HENRICUS EGIDIUS CATHARINA2 citations56

DE METSENAERE CHRISTOPHE

1 patent

US8786830B2Jul 22, 2014

Immersion lithographic apparatus including a pressure sensor to measure pressure of the immersion liquid and a device manufacturing method

DE METSENAERE CHRISTOPHE2 citations53

KUNNEN JOHAN GERTRUDIS CORNELIS

1 patent

US9897928B2Feb 20, 2018

Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method

KUNNEN JOHAN GERTRUDIS CORNELIS1 citations49

POLET THEODORUS WILHELMUS

1 patent

US9274436B2Mar 1, 2016

Lithographic apparatus and a device manufacturing method

POLET THEODORUS WILHELMUS0 citations45

THOMAS IVO ADAM JOHANNES

1 patent

US9904177B2Feb 27, 2018

Fluid handling structure, a lithographic apparatus and a device manufacturing method

THOMAS IVO ADAM JOHANNES0 citations35