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Inventor
MIYAHARA JUNICHI
JP
5 patents
⚠️ This page may combine multiple inventors who share the name “MIYAHARA JUNICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NHK SPRING CO LTD
2 patents
US7372001B2
May 13, 2008
Ceramics heater
NHK SPRING CO LTD
31 citations
90
US10276410B2
Apr 30, 2019
Substrate support device
NHK SPRING CO LTD
0 citations
36
FUTAKUCHIYA JUN
1 patent
US9153463B2
Oct 6, 2015
Substrate support device
FUTAKUCHIYA JUN
4 citations
65
HIRANO SATOSHI
1 patent
US10462850B2
Oct 29, 2019
Method of manufacturing ceramic sintered body, ceramic sintered body, and ceramic heater
HIRANO SATOSHI
1 citations
59
TAKAHARA GOU
1 patent
US9414441B2
Aug 9, 2016
Shaft-equipped heater unit and method for manufacturing shaft-equipped heater unit
TAKAHARA GOU
1 citations
39