Inventor
TAKAHARA GO
JP5 patents
Patents
5 patentsUS11477858B2Oct 18, 2022
Sheath heater
NHK SPRING CO LTD2 citations68
US12247296B2Mar 11, 2025
Member for plasma processing device
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US11201040B2Dec 14, 2021
Substrate supporting unit and film forming device having the substrate supporting unit
NHK SPRING CO LTD0 citations47
US11490464B2Nov 1, 2022
Heater unit
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US10276410B2Apr 30, 2019
Substrate support device
NHK SPRING CO LTD0 citations36