Inventor
LITTAU KARL
US26 patents
⚠️ This page may combine multiple inventors who share the name “LITTAU KARL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
10 patentsUS5800686ASep 1, 1998
Chemical vapor deposition chamber with substrate edge protection
APPLIED MATERIALS INC266 citations99
US6423949B1Jul 23, 2002
Multi-zone resistive heater
APPLIED MATERIALS INC534 citations98
US5695568ADec 9, 1997
Chemical vapor deposition chamber
APPLIED MATERIALS INC95 citations97
US6645884B1Nov 11, 2003
Method of forming a silicon nitride layer on a substrate
APPLIED MATERIALS INC61 citations96
US6500742B1Dec 31, 2002
Construction of a film on a semiconductor wafer
APPLIED MATERIALS INC36 citations96
US5882419AMar 16, 1999
Chemical vapor deposition chamber
APPLIED MATERIALS INC46 citations96
US6646235B2Nov 11, 2003
Multi-zone resistive heater
APPLIED MATERIALS INC43 citations92
US5858464AJan 12, 1999
Methods and apparatus for minimizing excess aluminum accumulation in CVD chambers
APPLIED MATERIALS INC21 citations92
US6444036B2Sep 3, 2002
Construction of a film on a semiconductor wafer
APPLIED MATERIALS INC13 citations73
US6251758B1Jun 26, 2001
Construction of a film on a semiconductor wafer
APPLIED MATERIALS INC11 citations73
INTERMOLECULAR INC
4 patentsUS9337030B2May 10, 2016
Method to grow in-situ crystalline IGZO using co-sputtering targets
INTERMOLECULAR INC3 citations71
US10580978B2Mar 3, 2020
Current compliance layers and memory arrays comprising thereof
INTERMOLECULAR INC2 citations68
US10833263B2Nov 10, 2020
Current compliance layers and memory arrays comprising thereof
INTERMOLECULAR INC0 citations47
US10364497B2Jul 30, 2019
Vapor based site-isolated processing systems and methods
INTERMOLECULAR INC0 citations40
XEROX CORP
3 patentsUS6866255B2Mar 15, 2005
Sputtered spring films with low stress anisotropy
XEROX CORP32 citations91
US7851226B2Dec 14, 2010
Osmotic reaction detector for monitoring biological and non-biological reactions
XEROX CORP1 citations51
US7615375B2Nov 10, 2009
Osmotic reaction cell for monitoring biological and non-biological reactions
XEROX CORP1 citations51
PALO ALTO RES CT INC
3 patentsUS10071518B2Sep 11, 2018
Method for interdigitated finger coextrusion
PALO ALTO RES CT INC4 citations73
US10232537B2Mar 19, 2019
Interdigitated finger coextrusion device
PALO ALTO RES CT INC1 citations62
US7794662B2Sep 14, 2010
Osmotic reaction detector for monitoring biological and non-biological reactions
PALO ALTO RES CT INC0 citations51