Inventor
SHEU BEN-LI
US16 patents
⚠️ This page may combine multiple inventors who share the name “SHEU BEN-LI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
12 patentsUS10431493B2Oct 1, 2019
Doping control of metal nitride films
APPLIED MATERIALS INC5 citations82
US9916975B2Mar 13, 2018
Precursors of manganese and manganese-based compounds for copper diffusion barrier layers and methods of use
APPLIED MATERIALS INC2 citations73
US10008412B2Jun 26, 2018
Doping control of metal nitride films
APPLIED MATERIALS INC2 citations71
US9659814B2May 23, 2017
Doping control of metal nitride films
APPLIED MATERIALS INC2 citations71
US10847463B2Nov 24, 2020
Seed layers for copper interconnects
APPLIED MATERIALS INC1 citations62
US11587829B2Feb 21, 2023
Doping control of metal nitride films
APPLIED MATERIALS INC0 citations61
US10910263B2Feb 2, 2021
Doping control of metal nitride films
APPLIED MATERIALS INC0 citations61
US10892186B2Jan 12, 2021
Integration of ALD copper with high temperature PVD copper deposition for BEOL interconnect
APPLIED MATERIALS INC0 citations61
US10665542B2May 26, 2020
Cobalt manganese vapor phase deposition
APPLIED MATERIALS INC0 citations52
US10283352B2May 7, 2019
Precursors of manganese and manganese-based compounds for copper diffusion barrier layers and methods of use
APPLIED MATERIALS INC0 citations52
US9953926B2Apr 24, 2018
Methods of depositing cobalt manganese films
APPLIED MATERIALS INC0 citations52
US10636655B2Apr 28, 2020
Methods for asymmetric deposition of metal on high aspect ratio nanostructures
APPLIED MATERIALS INC0 citations51