Inventor

JAGANNATH RAVICHANDRA

US2 patents

Patents

2 patents

US12418972B2Sep 16, 2025

Confocal chromatic metrology for EUV source condition monitoring

KLA CORP0 citations52

US12158576B2Dec 3, 2024

Counterflow gas nozzle for contamination mitigation in extreme ultraviolet inspection systems

KLA CORP0 citations46