Inventor
ELDRIDGE DAVID JAMES
US3 patents
Patents
3 patentsUS11035038B2Jun 15, 2021
Cold sintering of solid precursors
ENTEGRIS INC2 citations69
US11746413B2Sep 5, 2023
Chemical delivery system and method of operating the chemical delivery system
ENTEGRIS INC0 citations60
US11421320B2Aug 23, 2022
Chemical delivery system and method of operating the chemical delivery system
ENTEGRIS INC0 citations60