Inventor
GIM SUJI
KR8 patents
Patents
8 patentsUS12431340B2Sep 30, 2025
Exhaust gas processing apparatus having plasma source and substrate processing apparatus including the same
SAMSUNG ELECTRONICS CO LTD0 citations52
US12409404B2Sep 9, 2025
Scrubber system and wet cleaning method using the same
SAMSUNG ELECTRONICS CO LTD0 citations52
US11931683B2Mar 19, 2024
Scrubber system and wet cleaning method using the same
SAMSUNG ELECTRONICS CO LTD0 citations52
US11549178B2Jan 10, 2023
Apparatus for treating semiconductor process gas and method of treating semiconductor process gas
SAMSUNG ELECTRONICS CO LTD0 citations51
US12390763B2Aug 19, 2025
Apparatus trapping an exhaust material from a substrate-processing process and apparatus for processing a substrate including the trapping apparatus
SAMSUNG ELECTRONICS CO LTD0 citations47
US12577672B2Mar 17, 2026
Reaction gas supply system
SAMSUNG ELECTRONICS CO LTD0 citations43
US11660563B2May 30, 2023
Apparatus for collecting by-product and method for collecting by-product
SAMSUNG ELECTRONICS CO LTD0 citations43
US11738299B2Aug 29, 2023
Exhaust gas processing system including adsorbent for suppressing powder-like byproduct
SAMSUNG ELECTRONICS CO LTD0 citations41