Inventor
TAKATA FUMIYA
JP7 patents
Patents
7 patentsUS11251048B2Feb 15, 2022
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD2 citations71
US12575351B2Mar 10, 2026
Etching method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations59
US12456626B2Oct 28, 2025
Etching method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations59
US11062882B2Jul 13, 2021
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD0 citations59
US11594398B2Feb 28, 2023
Apparatus and method for plasma processing
TOKYO ELECTRON LTD0 citations50
US12488990B2Dec 2, 2025
Etching method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations47
US11569094B2Jan 31, 2023
Etching method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations45