Inventor
YOSHIMURA SHOTA
JP9 patents
⚠️ This page may combine multiple inventors who share the name “YOSHIMURA SHOTA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
6 patentsUS11380545B2Jul 5, 2022
Processing method and substrate processing apparatus
TOKYO ELECTRON LTD2 citations69
US12575351B2Mar 10, 2026
Etching method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations59
US12456626B2Oct 28, 2025
Etching method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations59
US9373520B2Jun 21, 2016
Multilayer film etching method and plasma processing apparatus
TOKYO ELECTRON LTD1 citations49
US9034698B2May 19, 2015
Semiconductor device manufacturing method
TOKYO ELECTRON LTD0 citations48
US12488990B2Dec 2, 2025
Etching method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations47