Inventor
HUANG JI-CHUNG
TW6 patents
Patents
6 patentsUS6004864ADec 21, 1999
Ion implant method for forming trench isolation for integrated circuit devices
TAIWAN SEMICONDUCTOR MFG23 citations92
US6248673B1Jun 19, 2001
Hydrogen thermal annealing method for stabilizing microelectronic devices
TAIWAN SEMICONDUCTOR MFG30 citations91
US5747382AMay 5, 1998
Two-step planarization process using chemical-mechanical polishing and reactive-ion-etching
TAIWAN SEMICONDUCTOR MFG30 citations91
US5874355AFeb 23, 1999
Method to prevent volcane effect in tungsten plug deposition
TAIWAN SEMICONDUCTOR MFG46 citations90
US6001540ADec 14, 1999
Microlens process
TAIWAN SEMICONDUCTOR MFG45 citations89
US5994213ANov 30, 1999
Aluminum plug process
TAIWAN SEMICONDUCTOR MFG7 citations70