Inventor
CHEN HAN-CHUNG
TW12 patents
⚠️ This page may combine multiple inventors who share the name “CHEN HAN-CHUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
7 patentsUS6090675AJul 18, 2000
Formation of dielectric layer employing high ozone:tetraethyl-ortho-silicate ratios during chemical vapor deposition
TAIWAN SEMICONDUCTOR MFG63 citations93
US5843838ADec 1, 1998
Modified clean recipe to suppress formation of BPSG bubble
TAIWAN SEMICONDUCTOR MFG7 citations72
US6294483B1Sep 25, 2001
Method for preventing delamination of APCVD BPSG films
TAIWAN SEMICONDUCTOR MFG9 citations71
US5994213ANov 30, 1999
Aluminum plug process
TAIWAN SEMICONDUCTOR MFG7 citations70
US5994219ANov 30, 1999
Add one process step to control the SI distribution of Alsicu to improved metal residue process window
TAIWAN SEMICONDUCTOR MFG3 citations62
US6245688B1Jun 12, 2001
Dry Air/N2 post treatment to avoid the formation of B/P precipitation after BPSG film deposition
TAIWAN SEMICONDUCTOR MFG2 citations55
US7205209B2Apr 17, 2007
Fabrication of stacked dielectric layer for suppressing electrostatic charge buildup
TAIWAN SEMICONDUCTOR MFG0 citations42