Inventor
CHIEN HUNG-JU
TW11 patents
Patents
11 patentsUS6399522B1Jun 4, 2002
PE-silane oxide particle performance improvement
TAIWAN SEMICONDUCTOR MFG37 citations92
US6268274B1Jul 31, 2001
Low temperature process for forming inter-metal gap-filling insulating layers in silicon wafer integrated circuitry
TAIWAN SEMICONDUCTOR MFG19 citations92
US6235653B1May 22, 2001
Ar-based si-rich oxynitride film for dual damascene and/or contact etch stop layer
TAIWAN SEMICONDUCTOR MFG24 citations91
US7026233B2Apr 11, 2006
Method for reducing defects in post passivation interconnect process
TAIWAN SEMICONDUCTOR MFG12 citations81
US6211075B1Apr 3, 2001
Method of improving metal stack reliability
TAIWAN SEMICONDUCTOR MFG12 citations74
US6479881B2Nov 12, 2002
Low temperature process for forming intermetal gap-filling insulating layers in silicon wafer integrated circuitry
TAIWAN SEMICONDUCTOR MFG6 citations73
US6558228B1May 6, 2003
Method of unloading substrates in chemical-mechanical polishing apparatus
TAIWAN SEMICONDUCTOR MFG11 citations69
US6042887AMar 28, 2000
Process for forming a sausg inter metal dielectric layer by pre-coating the reactor
TAIWAN SEMICONDUCTOR MFG13 citations69
US6499222B1Dec 31, 2002
Template for measuring edge width and method of using
TAIWAN SEMICONDUCTOR MFG5 citations60
US6397664B1Jun 4, 2002
Method and apparatus for detecting leakage in a flow control valve
TAIWAN SEMICONDUCTOR MFG4 citations57
US7528478B2May 5, 2009
Semiconductor devices having post passivation interconnections and a buffer layer
TAIWAN SEMICONDUCTOR MFG0 citations49